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VDI-Standard: VDI/VDE 2656 Blatt 1

Commentary
Generic information
Abstract
Abstract

Editorially revised version of the 2008 edition. This standard is restricted to scanning probe microscopes and their calibration. It covers the verification of the device characteristics necessary for the measurement of geometrical measurands, and the calibration of the axes of motion (x, y, z), i.e. the traceability to the unit of length via measurement on traceable lateral and step height standards. With the implementation of this standard the following objectives are pursued: increase in the comparability of measurements of geometrical quantities using scanning probe microscopes by traceability to the unit of length; definition of minimum requirements for the calibration process and the conditions of acceptance; ascertainment of the calibratability (assignment to calibratability categories); fixing of the scope of a calibration (conditions of measurement and environments, ranges of measurement, temporal stability, transferability); provision of a model according to GUM to calculate the uncertainty for simple geometrical quantities in measurements using a scanning probe microscope; definition of the requirements for a result report.

Keywords:

Calibration, Definitions, Determination, Electrical engineering, Equipment, Measurement, Measuring instruments, Measuring techniques, Measuring uncertainty, Metrology, Microscopy, Properties, Scanning electron microscopes, Specification (approval), Verification, Wear-quantity

Date:

2019-09

German Title:
English Title:

Determination of geometrical quantities by using of scanning probe microscopes - Calibration of measurement systems

Technical rules: Richtlinie
Issuing body:

VDI/VDE-Gesellschaft Mess- und Automatisierungstechnik

Author:

Fachbereich Fertigungsmesstechnik

Associated VDI Manuals: VDI-Handbuch Produktionstechnik und Fertigungsverfahren Band 3
VDI/VDE-Handbuch Fertigungsmesstechnik
Price:

174,70 EUR

Pages:

82

Classification:

17.040.01

available in:

Deutsch, Englisch

Keywords:

Calibration, Definitions, Determination, Electrical engineering, Equipment, Measurement, Measuring instruments, Measuring techniques, Measuring uncertainty, Metrology, Microscopy, Properties, Scanning electron microscopes, Specification (approval), Verification, Wear-quantity

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VDI/VDE 2656 Blatt 1

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