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VDI-Standard: VDI/VDE 2655 Blatt 1.3

Generic information
Abstract
Abstract

This standard characterises interference microscopes with their measuring technology properties for measuring the surfaces of form elements. This includes the feedback and the calculation of the measurement uncertainty when measuring shape parameters. In addition to the interference microscopes described in VDI 2655 Part 1.1, the methods described here can also be applied to interferometers whose measuring fields can have dimensions of up to approx. Ø 20 mm.

Table of contents: of the standard
Keywords:

Acceptance specification, Beam path, Characteristics, Comparability, Cut-off wavelength, Definitions, Flatness (surface), Interference (wave physics), Interferometry, Mathematical calculations, Measurement, Measuring instruments, Measuring uncertainty, Metrology, Microscopes, Microscopy, Normal, Optical systems, Profile measurement, Profilometers, Properties, Shape, Specification (approval), Surfaces, Topography, Wavelengths

Date:

2018-03

German Title:
English Title:

Optical measurement of microtopography - Calibration of interference microscopes for form measurement

Formal objection expiry date:

2018-08-31

Technical rules: Richtlinien-Entwurf
Issuing body:

VDI/VDE-Gesellschaft Mess- und Automatisierungstechnik

Author:

Fachbereich Fertigungsmesstechnik

Associated VDI Manuals: VDI-Handbuch Produktionstechnik und Fertigungsverfahren Band 3
VDI/VDE-Handbuch Fertigungsmesstechnik
VDI/VDE-Handbuch Optische Technologien
Price:

92,60 EUR

Pages:

31

Classification:

17.180.01

available in:

Deutsch

Keywords:

Acceptance specification, Beam path, Characteristics, Comparability, Cut-off wavelength, Definitions, Flatness (surface), Interference (wave physics), Interferometry, Mathematical calculations, Measurement, Measuring instruments, Measuring uncertainty, Metrology, Microscopes, Microscopy, Normal, Optical systems, Profile measurement, Profilometers, Properties, Shape, Specification (approval), Surfaces, Topography, Wavelengths

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VDI/VDE 2655 Blatt 1.3

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